Electrostatic shutter design for a miniaturized ion mobility spectrometer
Electrostatic ion shutters are a key component in ion mobility spectrometry technology. Ion mobility spectrometry instruments may be miniaturized by using MEMS components. In this paper we present an ion shutter made in bulk silicon micromachining. An optimization of the shutter design is made throu...
| Autores: | , , , , , , |
|---|---|
| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2006 |
| País: | España |
| Institución: | Consejo Superior de Investigaciones Científicas (CSIC) |
| Repositorio: | DIGITAL.CSIC. Repositorio Institucional del CSIC |
| OAI Identifier: | oai:digital.csic.es:10261/415879 |
| Acceso en línea: | http://hdl.handle.net/10261/415879 https://api.elsevier.com/content/abstract/scopus_id/33747845584 |
| Access Level: | acceso abierto |
| Palabra clave: | Ion mobility spectrometry Ion shutter MEMS Modelling http://metadata.un.org/sdg/9 Build resilient infrastructure, promote inclusive and sustainable industrialization and foster innovation |
| Sumario: | Electrostatic ion shutters are a key component in ion mobility spectrometry technology. Ion mobility spectrometry instruments may be miniaturized by using MEMS components. In this paper we present an ion shutter made in bulk silicon micromachining. An optimization of the shutter design is made through a physical model. A study has been carried out considering several parameters (electrode geometry, voltage applied) in order to achieve an optimal electrostatic shutter in terms of closure and aperture ratio. © 2006 Elsevier B.V. All rights reserved. |
|---|