Towards wafer-scale 2D material sensors
The unique properties of two-dimensional (2D) materials bring great promise to improve sensor performance and realise novel sensing principles. However, to enable their high-volume production, wafer-scale processes that allow integration with electronic readout circuits need to be developed. In this...
| Autores: | , , , , , , , , , , , , , , , , , , , , , , , , , , |
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| Formato: | artículo |
| Fecha de publicación: | 2025 |
| País: | España |
| Recursos: | Universitat Autònoma de Barcelona |
| Repositorio: | Dipòsit Digital de Documents de la UAB |
| Idioma: | inglés |
| OAI Identifier: | oai:ddd.uab.cat:310025 |
| Acesso em linha: | https://ddd.uab.cat/record/310025 https://dx.doi.org/urn:doi:10.1088/2053-1583/adac73 |
| Access Level: | acceso abierto |
| Palavra-chave: | 2D materials Sensor Graphene NEMS MEMS Waferscale CMOS |
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Towards wafer-scale 2D material sensorsSteeneken, Peter G.|||0000-0002-5764-1218Soikkeli, MiikaArpiainen, SannaRantala, ArtoJaaniso, RaivoPezone, RobertoVollebregt, Sten|||0000-0001-6012-6180Lukas, Sebastian|||0000-0002-8062-2832Kataria, SatenderHoumes, Maurits J. A.Álvarez Diduk, Ruslan|||0000-0002-9876-1574Lee, Kangho|||0000-0002-6495-5231Suryo Wasisto, HutomoAnzinger, Sebastian|||0000-0002-6272-590XFueldner, MarcVerbiest, Gerard J.|||0000-0002-1712-1234Alijani, FarbodHoon Shin, DongMalic, Erminvan Rijn, RichardNevanen, Tarja K.Centeno, Alba|||0000-0001-8442-2283Zurutuza, Amaiavan der Zant, Herre S. J.Merkoçi, Arben|||0000-0003-2486-8085Duesberg, Georg S.|||0000-0002-7412-700XLemme, Max C.|||0000-0003-4552-24112D materialsSensorGrapheneNEMSMEMSWaferscaleCMOSThe unique properties of two-dimensional (2D) materials bring great promise to improve sensor performance and realise novel sensing principles. However, to enable their high-volume production, wafer-scale processes that allow integration with electronic readout circuits need to be developed. In this perspective, we review recent progress in on-chip 2D material sensors, and compare their performance to the state-of-the-art, with a focus on results achieved in the Graphene Flagship programme. We discuss transfer-based and transfer-free production flows and routes for complementary metal-oxide-semiconductor integration and prototype development. Finally, we give an outlook on the future of 2D material sensors, and sketch a roadmap towards realising their industrial and societal impact. 22025-01-0120252025-01-01Articlehttp://purl.org/coar/resource_type/c_6501VoRhttp://purl.org/coar/version/c_970fb48d4fbd8a85info:eu-repo/semantics/articleapplication/pdfhttps://ddd.uab.cat/record/310025https://dx.doi.org/urn:doi:10.1088/2053-1583/adac73reponame:Dipòsit Digital de Documents de la UABinstname:Universitat Autònoma de BarcelonaInglésengEuropean Commission https://doi.org/10.13039/501100000780 881603Agencia Estatal de Investigación https://doi.org/10.13039/501100011033 CEX2021-001214-Sopen accesshttp://purl.org/coar/access_right/c_abf2Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, la comunicació pública de l'obra i la creació d'obres derivades, fins i tot amb finalitats comercials, sempre i quan es reconegui l'autoria de l'obra original.https://creativecommons.org/licenses/by/4.0/info:eu-repo/semantics/openAccessoai:ddd.uab.cat:3100252026-06-06T12:50:31Z |
| dc.title.none.fl_str_mv |
Towards wafer-scale 2D material sensors |
| title |
Towards wafer-scale 2D material sensors |
| spellingShingle |
Towards wafer-scale 2D material sensors Steeneken, Peter G.|||0000-0002-5764-1218 2D materials Sensor Graphene NEMS MEMS Waferscale CMOS |
| title_short |
Towards wafer-scale 2D material sensors |
| title_full |
Towards wafer-scale 2D material sensors |
| title_fullStr |
Towards wafer-scale 2D material sensors |
| title_full_unstemmed |
Towards wafer-scale 2D material sensors |
| title_sort |
Towards wafer-scale 2D material sensors |
| dc.creator.none.fl_str_mv |
Steeneken, Peter G.|||0000-0002-5764-1218 Soikkeli, Miika Arpiainen, Sanna Rantala, Arto Jaaniso, Raivo Pezone, Roberto Vollebregt, Sten|||0000-0001-6012-6180 Lukas, Sebastian|||0000-0002-8062-2832 Kataria, Satender Houmes, Maurits J. A. Álvarez Diduk, Ruslan|||0000-0002-9876-1574 Lee, Kangho|||0000-0002-6495-5231 Suryo Wasisto, Hutomo Anzinger, Sebastian|||0000-0002-6272-590X Fueldner, Marc Verbiest, Gerard J.|||0000-0002-1712-1234 Alijani, Farbod Hoon Shin, Dong Malic, Ermin van Rijn, Richard Nevanen, Tarja K. Centeno, Alba|||0000-0001-8442-2283 Zurutuza, Amaia van der Zant, Herre S. J. Merkoçi, Arben|||0000-0003-2486-8085 Duesberg, Georg S.|||0000-0002-7412-700X Lemme, Max C.|||0000-0003-4552-2411 |
| author |
Steeneken, Peter G.|||0000-0002-5764-1218 |
| author_facet |
Steeneken, Peter G.|||0000-0002-5764-1218 Soikkeli, Miika Arpiainen, Sanna Rantala, Arto Jaaniso, Raivo Pezone, Roberto Vollebregt, Sten|||0000-0001-6012-6180 Lukas, Sebastian|||0000-0002-8062-2832 Kataria, Satender Houmes, Maurits J. A. Álvarez Diduk, Ruslan|||0000-0002-9876-1574 Lee, Kangho|||0000-0002-6495-5231 Suryo Wasisto, Hutomo Anzinger, Sebastian|||0000-0002-6272-590X Fueldner, Marc Verbiest, Gerard J.|||0000-0002-1712-1234 Alijani, Farbod Hoon Shin, Dong Malic, Ermin van Rijn, Richard Nevanen, Tarja K. Centeno, Alba|||0000-0001-8442-2283 Zurutuza, Amaia van der Zant, Herre S. J. Merkoçi, Arben|||0000-0003-2486-8085 Duesberg, Georg S.|||0000-0002-7412-700X Lemme, Max C.|||0000-0003-4552-2411 |
| author_role |
author |
| author2 |
Soikkeli, Miika Arpiainen, Sanna Rantala, Arto Jaaniso, Raivo Pezone, Roberto Vollebregt, Sten|||0000-0001-6012-6180 Lukas, Sebastian|||0000-0002-8062-2832 Kataria, Satender Houmes, Maurits J. A. Álvarez Diduk, Ruslan|||0000-0002-9876-1574 Lee, Kangho|||0000-0002-6495-5231 Suryo Wasisto, Hutomo Anzinger, Sebastian|||0000-0002-6272-590X Fueldner, Marc Verbiest, Gerard J.|||0000-0002-1712-1234 Alijani, Farbod Hoon Shin, Dong Malic, Ermin van Rijn, Richard Nevanen, Tarja K. Centeno, Alba|||0000-0001-8442-2283 Zurutuza, Amaia van der Zant, Herre S. J. Merkoçi, Arben|||0000-0003-2486-8085 Duesberg, Georg S.|||0000-0002-7412-700X Lemme, Max C.|||0000-0003-4552-2411 |
| author2_role |
author author author author author author author author author author author author author author author author author author author author author author author author author author |
| dc.subject.none.fl_str_mv |
2D materials Sensor Graphene NEMS MEMS Waferscale CMOS |
| topic |
2D materials Sensor Graphene NEMS MEMS Waferscale CMOS |
| description |
The unique properties of two-dimensional (2D) materials bring great promise to improve sensor performance and realise novel sensing principles. However, to enable their high-volume production, wafer-scale processes that allow integration with electronic readout circuits need to be developed. In this perspective, we review recent progress in on-chip 2D material sensors, and compare their performance to the state-of-the-art, with a focus on results achieved in the Graphene Flagship programme. We discuss transfer-based and transfer-free production flows and routes for complementary metal-oxide-semiconductor integration and prototype development. Finally, we give an outlook on the future of 2D material sensors, and sketch a roadmap towards realising their industrial and societal impact. |
| publishDate |
2025 |
| dc.date.none.fl_str_mv |
2 2025-01-01 2025 2025-01-01 |
| dc.type.none.fl_str_mv |
Article http://purl.org/coar/resource_type/c_6501 VoR http://purl.org/coar/version/c_970fb48d4fbd8a85 |
| dc.type.openaire.fl_str_mv |
info:eu-repo/semantics/article |
| format |
article |
| dc.identifier.none.fl_str_mv |
https://ddd.uab.cat/record/310025 https://dx.doi.org/urn:doi:10.1088/2053-1583/adac73 |
| url |
https://ddd.uab.cat/record/310025 https://dx.doi.org/urn:doi:10.1088/2053-1583/adac73 |
| dc.language.none.fl_str_mv |
Inglés eng |
| language_invalid_str_mv |
Inglés |
| language |
eng |
| dc.relation.none.fl_str_mv |
European Commission https://doi.org/10.13039/501100000780 881603 Agencia Estatal de Investigación https://doi.org/10.13039/501100011033 CEX2021-001214-S |
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open access http://purl.org/coar/access_right/c_abf2 https://creativecommons.org/licenses/by/4.0/ |
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info:eu-repo/semantics/openAccess |
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open access http://purl.org/coar/access_right/c_abf2 https://creativecommons.org/licenses/by/4.0/ |
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openAccess |
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application/pdf |
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reponame:Dipòsit Digital de Documents de la UAB instname:Universitat Autònoma de Barcelona |
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Universitat Autònoma de Barcelona |
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15,30478 |