Design, fabrication and characterization of Si nanopillars-based photonic crystal for mechanical sensing
Màster en Nanociència i Nanotecnologia, Facultat de Física, Universitat de Barcelona, Curs: 2017-2018. Tutor: Albert Romano Rodríguez
| Autor: | |
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| Tipo de recurso: | tesis de maestría |
| Fecha de publicación: | 2018 |
| País: | España |
| Institución: | Universidad de Barcelona |
| Repositorio: | Dipòsit Digital de la UB |
| OAI Identifier: | oai:diposit.ub.edu:2445/127014 |
| Acceso en línea: | https://hdl.handle.net/2445/127014 |
| Access Level: | acceso abierto |
| Palabra clave: | Nanoelectrònica Silici Treballs de fi de màster Nanoelectronics Silicon Master's theses |
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Design, fabrication and characterization of Si nanopillars-based photonic crystal for mechanical sensingLópez Aymerich, ElenaNanoelectrònicaSiliciTreballs de fi de màsterNanoelectronicsSiliconMaster's thesesMàster en Nanociència i Nanotecnologia, Facultat de Física, Universitat de Barcelona, Curs: 2017-2018. Tutor: Albert Romano RodríguezIn this work the first results of the experimental implementation of silicon nanopillars hexagonal arrays acting as photonic crystals with the aim of their use as force sensors are presented. The starting point are two previous bachelor and master thesis that have shown the theoretical potentialities of such a structure acting as a photonic crystal and as a mechanical sensor due to deflection of the nanopillars. Here we present the optimization of the fabrication procedure of these nanostructures, based on a sequence of complex processes carried out in Clean-Room environment, and the support of simulations and morphological analysis via Scanning Electron Microscopy and the results obtained from Fourier Transform Infra-Red spectroscopy characterisation match the simulations of the photonic crystal, with bandgaps in the near infrared range, and pave the way in the use of such structures for mechanical testing in biomedical applications.Romano Rodríguez, Albert2018info:eu-repo/semantics/masterThesisapplication/pdfhttps://hdl.handle.net/2445/127014Màster Oficial - Nanociència i Nanotecnologiareponame:Dipòsit Digital de la UBinstname:Universidad de BarcelonaIngléscc-by-nc-nd (c) López Aymerich, 2018http://creativecommons.org/licenses/by-nc-nd/3.0/es/info:eu-repo/semantics/openAccessoai:diposit.ub.edu:2445/1270142026-05-27T06:46:51Z |
| dc.title.none.fl_str_mv |
Design, fabrication and characterization of Si nanopillars-based photonic crystal for mechanical sensing |
| title |
Design, fabrication and characterization of Si nanopillars-based photonic crystal for mechanical sensing |
| spellingShingle |
Design, fabrication and characterization of Si nanopillars-based photonic crystal for mechanical sensing López Aymerich, Elena Nanoelectrònica Silici Treballs de fi de màster Nanoelectronics Silicon Master's theses |
| title_short |
Design, fabrication and characterization of Si nanopillars-based photonic crystal for mechanical sensing |
| title_full |
Design, fabrication and characterization of Si nanopillars-based photonic crystal for mechanical sensing |
| title_fullStr |
Design, fabrication and characterization of Si nanopillars-based photonic crystal for mechanical sensing |
| title_full_unstemmed |
Design, fabrication and characterization of Si nanopillars-based photonic crystal for mechanical sensing |
| title_sort |
Design, fabrication and characterization of Si nanopillars-based photonic crystal for mechanical sensing |
| dc.creator.none.fl_str_mv |
López Aymerich, Elena |
| author |
López Aymerich, Elena |
| author_facet |
López Aymerich, Elena |
| author_role |
author |
| dc.contributor.none.fl_str_mv |
Romano Rodríguez, Albert |
| dc.subject.none.fl_str_mv |
Nanoelectrònica Silici Treballs de fi de màster Nanoelectronics Silicon Master's theses |
| topic |
Nanoelectrònica Silici Treballs de fi de màster Nanoelectronics Silicon Master's theses |
| description |
Màster en Nanociència i Nanotecnologia, Facultat de Física, Universitat de Barcelona, Curs: 2017-2018. Tutor: Albert Romano Rodríguez |
| publishDate |
2018 |
| dc.date.none.fl_str_mv |
2018 |
| dc.type.none.fl_str_mv |
info:eu-repo/semantics/masterThesis |
| format |
masterThesis |
| dc.identifier.none.fl_str_mv |
https://hdl.handle.net/2445/127014 |
| url |
https://hdl.handle.net/2445/127014 |
| dc.language.none.fl_str_mv |
Inglés |
| language_invalid_str_mv |
Inglés |
| dc.rights.none.fl_str_mv |
cc-by-nc-nd (c) López Aymerich, 2018 http://creativecommons.org/licenses/by-nc-nd/3.0/es/ info:eu-repo/semantics/openAccess |
| rights_invalid_str_mv |
cc-by-nc-nd (c) López Aymerich, 2018 http://creativecommons.org/licenses/by-nc-nd/3.0/es/ |
| eu_rights_str_mv |
openAccess |
| dc.format.none.fl_str_mv |
application/pdf |
| dc.source.none.fl_str_mv |
Màster Oficial - Nanociència i Nanotecnologia reponame:Dipòsit Digital de la UB instname:Universidad de Barcelona |
| instname_str |
Universidad de Barcelona |
| reponame_str |
Dipòsit Digital de la UB |
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Dipòsit Digital de la UB |
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|
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1869402996443447296 |
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15.301603 |