Design and characterization of thermally actuated bimetallic membranes by Michelson interferometry
This paper presents the design and characterization of thermally actuated Al-Si bimetallic membranes. The design was made with the Finite Element Method and was emphasized on optimizing the thickness ratio between the aluminum and silicon layers. The membrane deflection was measured employing the Mi...
| Autores: | , , |
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| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2011 |
| País: | España |
| Institución: | Universidad de Barcelona |
| Repositorio: | Dipòsit Digital de la UB |
| OAI Identifier: | oai:diposit.ub.edu:2445/69309 |
| Acceso en línea: | https://hdl.handle.net/2445/69309 |
| Access Level: | acceso abierto |
| Palabra clave: | Interferometria Mètode dels elements finits Bimetal·lisme Interferometry Finite element method Bimetallism |
| Sumario: | This paper presents the design and characterization of thermally actuated Al-Si bimetallic membranes. The design was made with the Finite Element Method and was emphasized on optimizing the thickness ratio between the aluminum and silicon layers. The membrane deflection was measured employing the Michelson Interferometer. The experimental process was carried out with square membranes of 5 mm of side length, 10 mm in silicon thickness, and an aluminum thicknesses of 4 and 1 mm. A maximum deflection of 14 mm was obtained for membranes with 4 mm of aluminum thickness, which is consistent with predictions made by numerical calculations. |
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