Diseño y Fabricación de dispositivos Metal-Aislante-Metal utilizando la técnica Electrospray
Anglès: Nowadays there is an interesting grown of the manipulation of matter at the nanometric scale in order to develop new Nano-devices and to make use of theirs nanometric properties. The research group of Micro and Nano Technologies (MNT) of UPC has developed a technique for depositing Nano-part...
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| Tipo de recurso: | tesis de maestría |
| Fecha de publicación: | 2014 |
| País: | España |
| Institución: | Universitat Politècnica de Catalunya (UPC) |
| Repositorio: | UPCommons. Portal del coneixement obert de la UPC |
| Idioma: | español |
| OAI Identifier: | oai:upcommons.upc.edu:2099.1/20932 |
| Acceso en línea: | https://hdl.handle.net/2099.1/20932 |
| Access Level: | acceso abierto |
| Palabra clave: | Impedance spectroscopy Nanoparticles electrospray MIM supercapacitor EDLC Nanopartículas Espectroscòpia d'impedància Condensadors Àrees temàtiques de la UPC::Enginyeria electrònica |
| Sumario: | Anglès: Nowadays there is an interesting grown of the manipulation of matter at the nanometric scale in order to develop new Nano-devices and to make use of theirs nanometric properties. The research group of Micro and Nano Technologies (MNT) of UPC has developed a technique for depositing Nano-particles, called electrospray, is being applied to the manufacture of Nanophotonic devices. In this project the electrospray technique is used to deposit Nano-particles of dielectric materials and manufacture a Metal- Insulator -Metal (MIM) device. The capacitors fabricated in this project, consist of a metal layer deposited by sputtering, a layer of Nano-particles of insulating material deposited by electrospray and another metal layer deposited by thermal evaporation. The matter used for Nano-particles is silicon oxide nanospheres, the metal is aluminum. Work areas will be of the order of 7x10-6 m2 and thicknesses of the order of 10 microns. By electron microscope (SEM -FIB) of the CRNE lab, pictures are taken once manufactured devices. Measures are made on function of frequency of capacity, equivalent series resistance, impedance, phase; the Nyquist plot is also obtained to analyze the behavior of the MIM devices and contrast with some capacitors in the literature. The results indicated capacitance density of 0.2mF/cm2 to 1kHz and 0V dc bias. This project aims to analyze the interesting features arising from the use of nano-spheres for the performance of the insulation. Preliminary evidence suggests that the effect of using these nanospheres causes an increase of several orders of magnitude expected capacity, suggesting that these new devices are promising for use as "supercapacitors". |
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