Silicon‐based intermediate‐band infrared photodetector realized by Te Hyperdoping
Si-based photodetectors satisfy the criteria of being low-cost and environmentally friendly, and can enable the development of on-chip complementary metal-oxide-semiconductor (CMOS)-compatible photonic systems. However, extending their room-temperature photoresponse into the mid-wavelength infrared...
| Autores: | , , , , , , , , , |
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| Tipo de recurso: | artículo |
| Fecha de publicación: | 2020 |
| País: | España |
| Institución: | Universidad Complutense de Madrid (UCM) |
| Repositorio: | Docta Complutense |
| Idioma: | inglés |
| OAI Identifier: | oai:docta.ucm.es:20.500.14352/101023 |
| Acceso en línea: | https://hdl.handle.net/20.500.14352/101023 |
| Access Level: | acceso abierto |
| Palabra clave: | 537 CMOS compatible Hyperdoping Ion implantation Mid-wavelength infrared photodetectors Si photonics Electrónica (Física) 2203.08 Fotoelectricidad |
| Sumario: | Si-based photodetectors satisfy the criteria of being low-cost and environmentally friendly, and can enable the development of on-chip complementary metal-oxide-semiconductor (CMOS)-compatible photonic systems. However, extending their room-temperature photoresponse into the mid-wavelength infrared (MWIR) regime remains challenging due to the intrinsic bandgap of Si. Here, we report on a comprehensive study of a room-temperature MWIR photodetector based on Si hyperdoped with Te. The demonstrated MWIR p-n photodiode exhibits a spectral photoresponse up to 5 mu m and a slightly lower detector performance than the commercial devices in the wavelength range of 1.0-1.9 mu m. The correlation between the background noise and the sensitivity of the Te-hyperdoped Si photodiode, where the maximum room-temperature specific detectivity is found to be 3.2 x 10(12) cmHz(1/2) W-1 and 9.2 x 10(8) cmHz(1/2) W-1 at 1 mu m and 1.55 mu m, respectively, is also investigated. This work contributes to pave the way towards establishing a Si-based broadband infrared photonic system operating at room temperature. |
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