An Analytic Equation for Assessing the Thickness of Titanium Nitride Coatings by Energy Dispersive X-ray Spectroscopy in the Scanning Electron Microscope

© 2023 The Author(s). Published by Oxford University Press on behalf of the Microscopy Society of America. All rights reserved.In this study, a methodology for assessing the thickness of titanium nitride (TiN) coatings by energy dispersive X-ray spectroscopy (EDS) in the scanning electron microscope...

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Autores: Cruz J.P.N., Garzon C.M., Recco, Abel Andre Candido
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2023
País:Brasil
Institución:Universidade do Estado de Santa Catarina (UDESC)
Repositorio:Repositório Institucional da Udesc
Idioma:inglés
OAI Identifier:oai:repositorio.udesc.br:UDESC/2286
Acceso en línea:https://repositorio.udesc.br/handle/UDESC/2286
Access Level:acceso abierto
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spelling An Analytic Equation for Assessing the Thickness of Titanium Nitride Coatings by Energy Dispersive X-ray Spectroscopy in the Scanning Electron Microscope© 2023 The Author(s). Published by Oxford University Press on behalf of the Microscopy Society of America. All rights reserved.In this study, a methodology for assessing the thickness of titanium nitride (TiN) coatings by energy dispersive X-ray spectroscopy (EDS) in the scanning electron microscope is explored. A standardless method is applied, where the film thickness (th) is related to the microscope accelerating voltage (V0), the type of substrate and the ratio between the more intense peaks in the EDS spectrum, arising from both the substrate and the coating (afterwards called the I-ratio, IR). Three different substrates covered with TiN were studied, namely, silicon, glass, and stainless steel. Monte Carlo simulations enabled to state an analytic equation, which allows assessing the coating thickness as follows:th=thcr⋅exp[-βIR1/n] where IR = Iksubstrate/Ikcoating, thcr (critical thickness) is the largest coating thickness, which is assessable at a fixed V0, β is a multiplication factor, and n is an exponent, where thcr, β and n are assessable from V0 and substrate type. Interpolation via the equation presented, using reference thicknesses, allowed thickness predictions with around 80% of datapoints differing less than around 2% from the reference value. A procedure for detecting variations as low as 1.0% in coating thickness regarding the nominal thickness is presented.2024-12-05T15:04:46Z2023info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articlep. 938 - 9521435-811510.1093/micmic/ozad051https://repositorio.udesc.br/handle/UDESC/2286Microscopy and Microanalysis293engreponame:Repositório Institucional da Udescinstname:Universidade do Estado de Santa Catarina (UDESC)instacron:UDESCinfo:eu-repo/semantics/openAccessCruz J.P.N.Garzon C.M.Recco, Abel Andre Candido2024-12-07T20:38:22Zoai:repositorio.udesc.br:UDESC/2286Biblioteca Digital de Teses e Dissertaçõeshttps://pergamumweb.udesc.br/biblioteca/index.phpPRIhttps://repositorio-api.udesc.br/server/oai/requestri@udesc.bropendoar:63912024-12-07T20:38:22Repositório Institucional da Udesc - Universidade do Estado de Santa Catarina (UDESC)false
dc.title.none.fl_str_mv An Analytic Equation for Assessing the Thickness of Titanium Nitride Coatings by Energy Dispersive X-ray Spectroscopy in the Scanning Electron Microscope
title An Analytic Equation for Assessing the Thickness of Titanium Nitride Coatings by Energy Dispersive X-ray Spectroscopy in the Scanning Electron Microscope
spellingShingle An Analytic Equation for Assessing the Thickness of Titanium Nitride Coatings by Energy Dispersive X-ray Spectroscopy in the Scanning Electron Microscope
Cruz J.P.N.
title_short An Analytic Equation for Assessing the Thickness of Titanium Nitride Coatings by Energy Dispersive X-ray Spectroscopy in the Scanning Electron Microscope
title_full An Analytic Equation for Assessing the Thickness of Titanium Nitride Coatings by Energy Dispersive X-ray Spectroscopy in the Scanning Electron Microscope
title_fullStr An Analytic Equation for Assessing the Thickness of Titanium Nitride Coatings by Energy Dispersive X-ray Spectroscopy in the Scanning Electron Microscope
title_full_unstemmed An Analytic Equation for Assessing the Thickness of Titanium Nitride Coatings by Energy Dispersive X-ray Spectroscopy in the Scanning Electron Microscope
title_sort An Analytic Equation for Assessing the Thickness of Titanium Nitride Coatings by Energy Dispersive X-ray Spectroscopy in the Scanning Electron Microscope
dc.creator.none.fl_str_mv Cruz J.P.N.
Garzon C.M.
Recco, Abel Andre Candido
author Cruz J.P.N.
author_facet Cruz J.P.N.
Garzon C.M.
Recco, Abel Andre Candido
author_role author
author2 Garzon C.M.
Recco, Abel Andre Candido
author2_role author
author
description © 2023 The Author(s). Published by Oxford University Press on behalf of the Microscopy Society of America. All rights reserved.In this study, a methodology for assessing the thickness of titanium nitride (TiN) coatings by energy dispersive X-ray spectroscopy (EDS) in the scanning electron microscope is explored. A standardless method is applied, where the film thickness (th) is related to the microscope accelerating voltage (V0), the type of substrate and the ratio between the more intense peaks in the EDS spectrum, arising from both the substrate and the coating (afterwards called the I-ratio, IR). Three different substrates covered with TiN were studied, namely, silicon, glass, and stainless steel. Monte Carlo simulations enabled to state an analytic equation, which allows assessing the coating thickness as follows:th=thcr⋅exp[-βIR1/n] where IR = Iksubstrate/Ikcoating, thcr (critical thickness) is the largest coating thickness, which is assessable at a fixed V0, β is a multiplication factor, and n is an exponent, where thcr, β and n are assessable from V0 and substrate type. Interpolation via the equation presented, using reference thicknesses, allowed thickness predictions with around 80% of datapoints differing less than around 2% from the reference value. A procedure for detecting variations as low as 1.0% in coating thickness regarding the nominal thickness is presented.
publishDate 2023
dc.date.none.fl_str_mv 2023
2024-12-05T15:04:46Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv 1435-8115
10.1093/micmic/ozad051
https://repositorio.udesc.br/handle/UDESC/2286
identifier_str_mv 1435-8115
10.1093/micmic/ozad051
url https://repositorio.udesc.br/handle/UDESC/2286
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Microscopy and Microanalysis
29
3
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv p. 938 - 952
dc.source.none.fl_str_mv reponame:Repositório Institucional da Udesc
instname:Universidade do Estado de Santa Catarina (UDESC)
instacron:UDESC
instname_str Universidade do Estado de Santa Catarina (UDESC)
instacron_str UDESC
institution UDESC
reponame_str Repositório Institucional da Udesc
collection Repositório Institucional da Udesc
repository.name.fl_str_mv Repositório Institucional da Udesc - Universidade do Estado de Santa Catarina (UDESC)
repository.mail.fl_str_mv ri@udesc.br
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