Digital Demodulation Using I/Q Signals and Optical Phase Control Applied to a Vibrometer

An efficient and cost effective optical phase detection vibrometer based on a modified closed loop homodyne Michelson interferometer is presented. Real-time phase demodulation is carried out, using an embedded platform that performs data acquisition, signal processing, PI (proportional-integral) con...

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Detalhes bibliográficos
Autores: Galvez-Limaco, Angel Manuel [UNESP], Galeti, Jose Henrique, Nelli Silva, Emilio Carlos, Higuti, Ricardo Tokio [UNESP], Connelly, Michael J., Kitano, Claudio [UNESP]
Formato: artículo
Estado:Versión publicada
Fecha de publicación:2020
País:Brasil
Recursos:Universidade Estadual Paulista (UNESP)
Repositorio:Repositório Institucional da UNESP
Idioma:inglés
OAI Identifier:oai:repositorio.unesp.br:11449/209603
Acesso em linha:http://dx.doi.org/10.1109/JSEN.2020.2997900
http://hdl.handle.net/11449/209603
Access Level:acceso abierto
Palavra-chave:Optical interferometry
Optical sensors
Laser beams
Adaptive optics
Piezoelectric materials
Semiconductor device measurement
piezoelectric transducers
signal processing
metrology
Descrição
Resumo:An efficient and cost effective optical phase detection vibrometer based on a modified closed loop homodyne Michelson interferometer is presented. Real-time phase demodulation is carried out, using an embedded platform that performs data acquisition, signal processing, PI (proportional-integral) control and the generation of signals that drive the electrooptic Pockels cell phase shifter and the piezoelectric actuator under test. Two phase quadrature signals are generated from a single interferometric output, using the interleaving action, in alternation, of a digitally generated modulating signal, and then the well-known differential-cross-multiplication technique is applied to perform the computation of the phase shift of interest. The quadrature condition is reached using the PI loop based on an error signal obtained from a Lissajous figure derived from out-of-phase signals. The vibrometer is capable of measuring nanometric displacements, and is simple, inexpensive, accurate, immune to fading and self-consistent. The new method was used to determine the displacement frequency response curves of two prototypes of multi-actuated flextensional piezoelectric actuators. Measurements were made between 500 Hz and 15 kHz, and the results agreed with those obtained by the standard SCM-Signal Coincidence Method.