Structural properties of porous silicon/SnO2:F heterostructures

In this work we present structural studies made on SnO2 deposited on macroporous silicon structures. The porous silicon substrates were prepared by anodization of p-type silicon wafers. The SnO2 doped layers were synthesized by the sol?gel method from SnCl4·5H2O-ethanolic precursor, where the effect...

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Detalles Bibliográficos
Autores: Garces Pineda, Felipe Andres, Acquaroli, Leandro Nicolás, Urteaga, Raul, Dussan, A., Koropecki, Roberto Roman, Arce, Roberto Delio
Tipo de recurso: artículo
Estado:Versión publicada
Fecha de publicación:2012
País:Argentina
Institución:Consejo Nacional de Investigaciones Científicas y Técnicas
Repositorio:CONICET Digital (CONICET)
Idioma:inglés
OAI Identifier:oai:ri.conicet.gov.ar:11336/18766
Acceso en línea:http://hdl.handle.net/11336/18766
Access Level:acceso abierto
Palabra clave:Porous Silicon
Transparent Conducting Oxides
Solgel Deposition
Tin Oxide
Doped Oxides
Microstructure
X-Ray Diffraction
https://purl.org/becyt/ford/1.3
https://purl.org/becyt/ford/1
Descripción
Sumario:In this work we present structural studies made on SnO2 deposited on macroporous silicon structures. The porous silicon substrates were prepared by anodization of p-type silicon wafers. The SnO2 doped layers were synthesized by the sol?gel method from SnCl4·5H2O-ethanolic precursor, where the effect of fluorine doping level on structural properties was investigated. The fundamental structural parameters of tin oxide such as the lattice parameter and the crystallite size were studied in correlation with the dopant concentration. In addition, the effect of fluorine incorporation into the structure of tin oxide was analyzed on the basis of theoretical calculations that take into account the structural factor. The results obtained indicate that incorporation of fluorine occurs only at substitutional sites for SnO2 deposited on porous silicon.