Parametric analysis on the design of RF mems series switches
A parametric analysis on the design of RF MEMS series switches is performed. The main design variables were identified and a set of RF MEMS series switches were designed, fabricated and measured. The effect of these design variables on the pull-in voltage (Vp) and the RF performance of the switches...
| Authors: | , |
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| Format: | article |
| Status: | Published version |
| Publication Date: | 2015 |
| Country: | Argentina |
| Institution: | Consejo Nacional de Investigaciones Científicas y Técnicas |
| Repository: | CONICET Digital (CONICET) |
| Language: | English |
| OAI Identifier: | oai:ri.conicet.gov.ar:11336/71080 |
| Online Access: | http://hdl.handle.net/11336/71080 |
| Access Level: | Open access |
| Keyword: | RF MEMS Pull-in Voltage Cantilever Beam S-parameters https://purl.org/becyt/ford/2.2 https://purl.org/becyt/ford/2 |
| Summary: | A parametric analysis on the design of RF MEMS series switches is performed. The main design variables were identified and a set of RF MEMS series switches were designed, fabricated and measured. The effect of these design variables on the pull-in voltage (Vp) and the RF performance of the switches is studied and simplified equations for design propose are evaluated and corrected on the basis of experimental results. |
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