Parametric analysis on the design of RF mems series switches

A parametric analysis on the design of RF MEMS series switches is performed. The main design variables were identified and a set of RF MEMS series switches were designed, fabricated and measured. The effect of these design variables on the pull-in voltage (Vp) and the RF performance of the switches...

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Bibliographic Details
Authors: Lonac, Julio Andrés, Merletti, Gustavo Ariel
Format: article
Status:Published version
Publication Date:2015
Country:Argentina
Institution:Consejo Nacional de Investigaciones Científicas y Técnicas
Repository:CONICET Digital (CONICET)
Language:English
OAI Identifier:oai:ri.conicet.gov.ar:11336/71080
Online Access:http://hdl.handle.net/11336/71080
Access Level:Open access
Keyword:RF MEMS
Pull-in Voltage
Cantilever Beam
S-parameters
https://purl.org/becyt/ford/2.2
https://purl.org/becyt/ford/2
Description
Summary:A parametric analysis on the design of RF MEMS series switches is performed. The main design variables were identified and a set of RF MEMS series switches were designed, fabricated and measured. The effect of these design variables on the pull-in voltage (Vp) and the RF performance of the switches is studied and simplified equations for design propose are evaluated and corrected on the basis of experimental results.