Basic mechanisms for hillock formation during etching
The formation of etch hillocks was explored in the framework of a site-dependent detachment probabilities model. Monte Carlo simulations were carried out for a one-dimensional substrate within a restricted solid-on-solid model in which only first neighbour interactions are considered. We specificall...
| Autores: | , , |
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| Tipo de recurso: | artículo |
| Estado: | Versión publicada |
| Fecha de publicación: | 2008 |
| País: | Argentina |
| Institución: | Consejo Nacional de Investigaciones Científicas y Técnicas |
| Repositorio: | CONICET Digital (CONICET) |
| Idioma: | inglés |
| OAI Identifier: | oai:ri.conicet.gov.ar:11336/69245 |
| Acceso en línea: | http://hdl.handle.net/11336/69245 |
| Access Level: | acceso abierto |
| Palabra clave: | Etching Patterning Solid Surfaces Structure And Morphology https://purl.org/becyt/ford/1.4 https://purl.org/becyt/ford/1 https://purl.org/becyt/ford/1.3 |
| Sumario: | The formation of etch hillocks was explored in the framework of a site-dependent detachment probabilities model. Monte Carlo simulations were carried out for a one-dimensional substrate within a restricted solid-on-solid model in which only first neighbour interactions are considered. We specifically focus on describing the dynamics that lead to hillock-and-valley patterns. The mechanisms responsible for the steady state morphologies were related to apex creation and annihilation, together with valley and hillock etching, but pattern formation reflects two feedback loops that interrelate these mechanisms. |
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