Cita APA

Martil De La Plaza, I., González Díaz, G., García, S., & Martín, J. (1998). Dependence of the physical properties of SiNx: H films deposited by the ECR plasma method on the discharge size.

Citación estilo Chicago

Martil De La Plaza, Ignacio, Germán González Díaz, S. García, y J.M Martín. Dependence of the Physical Properties of SiNx: H Films Deposited By the ECR Plasma Method On the Discharge Size. 1998.

Cita MLA

Martil De La Plaza, Ignacio, Germán González Díaz, S. García, y J.M Martín. Dependence of the Physical Properties of SiNx: H Films Deposited By the ECR Plasma Method On the Discharge Size. 1998.