Cita APA

Martil De La Plaza, I., & González Díaz, G. (1999). Electrical characterization of ECR enhaced deposited silicon nitride bilayers for high quality Al/SiNx/InP MIS structure fabrication.

Citación estilo Chicago

Martil De La Plaza, Ignacio, y Germán González Díaz. Electrical Characterization of ECR Enhaced Deposited Silicon Nitride Bilayers for High Quality Al/SiNx/InP MIS Structure Fabrication. 1999.

Cita MLA

Martil De La Plaza, Ignacio, y Germán González Díaz. Electrical Characterization of ECR Enhaced Deposited Silicon Nitride Bilayers for High Quality Al/SiNx/InP MIS Structure Fabrication. 1999.