Martil De La Plaza, I., González Díaz, G., & San Andrés Serrano, E. (2005). On the influence of substrate cleaning method and rapid thermal annealing conditions on the electrical characteristics of Al/SiNx/SiO2/Si fabricated by ECR-CVD.
Citación estilo ChicagoMartil De La Plaza, Ignacio, Germán González Díaz, y Enrique San Andrés Serrano. On the Influence of Substrate Cleaning Method and Rapid Thermal Annealing Conditions On the Electrical Characteristics of Al/SiNx/SiO2/Si Fabricated By ECR-CVD. 2005.
Cita MLAMartil De La Plaza, Ignacio, Germán González Díaz, y Enrique San Andrés Serrano. On the Influence of Substrate Cleaning Method and Rapid Thermal Annealing Conditions On the Electrical Characteristics of Al/SiNx/SiO2/Si Fabricated By ECR-CVD. 2005.