Wang, L., Reehal, H., Martínez Viviente, F. L., San Andrés, E., & Prado, A. d. (2003). Characterization of nitrogen-rich silicon nitride films grown by the electron cyclotron resonance plasma technique.
Chicago Style CitationWang, L., H.S Reehal, Felix Lorenzo Martínez Viviente, E. San Andrés, and A. del Prado. Characterization of Nitrogen-rich Silicon Nitride Films Grown By the Electron Cyclotron Resonance Plasma Technique. 2003.
MLA CitationWang, L., et al. Characterization of Nitrogen-rich Silicon Nitride Films Grown By the Electron Cyclotron Resonance Plasma Technique. 2003.
Warning: These citations may not always be 100% accurate.