Cita APA

Martil De La Plaza, I., González Díaz, G., Martínez, F., Selle, B., & Sieber, I. (1998). Influence of rapid thermal annealing processes on the properties of SiNx: H films deposited by the electron cyclotron resonance method.

Citación estilo Chicago

Martil De La Plaza, Ignacio, Germán González Díaz, F.L Martínez, B. Selle, y I. Sieber. Influence of Rapid Thermal Annealing Processes On the Properties of SiNx: H Films Deposited By the Electron Cyclotron Resonance Method. 1998.

Cita MLA

Martil De La Plaza, Ignacio, et al. Influence of Rapid Thermal Annealing Processes On the Properties of SiNx: H Films Deposited By the Electron Cyclotron Resonance Method. 1998.