Cita APA

Leveque, P., Kortegaard Nielsen, H., Pellegrino, P., Hallen, A., Svensson, B. G., Kuznetsov, A., . . . Privitera, V. (2003). Vacancy and interstitial depth profiles in ion-implanted silicon.

Citación estilo Chicago

Leveque, P., H. Kortegaard Nielsen, Paolo Pellegrino, A. Hallen, Bengt G. Svensson, Andrej Kuznetsov, J. Wong-Leung, C. (Chennupati) Jagadish, y V. Privitera. Vacancy and Interstitial Depth Profiles in Ion-implanted Silicon. 2003.

Cita MLA

Leveque, P., et al. Vacancy and Interstitial Depth Profiles in Ion-implanted Silicon. 2003.