Cita APA

Martil De La Plaza, I., González Díaz, G., García, S., Castán, E., Dueñas, S., & Fernández, M. (1998). Deposition of SiNx: H thin films by the electron cyclotron resonance and its application to Al/SiNx : H/Si structures.

Citación estilo Chicago

Martil De La Plaza, Ignacio, Germán González Díaz, S. García, E. Castán, S. Dueñas, y M. Fernández. Deposition of SiNx: H Thin Films By the Electron Cyclotron Resonance and Its Application to Al/SiNx : H/Si Structures. 1998.

Cita MLA

Martil De La Plaza, Ignacio, et al. Deposition of SiNx: H Thin Films By the Electron Cyclotron Resonance and Its Application to Al/SiNx : H/Si Structures. 1998.