García Molleja, J., Gomez, B. J. A., Ferron, J., Gautron, E., Burgi, J. M., Abdallah, B., . . . Jouan, P. (2013). AlN thin films deposited by DC reactive magnetron sputtering: Effect of oxygen on film growth.
Citação norma ChicagoGarcía Molleja, Javier, Bernardo Jose Armando Gomez, Julio Ferron, Eric Gautron, Juan Mauel Burgi, Bassam Abdallah, Mohamed Abdou Djouadi, Jorge Nestor Feugeas, y Pierre-Yves Jouan. AlN Thin Films Deposited By DC Reactive Magnetron Sputtering: Effect of Oxygen On Film Growth. 2013.
Citação norma MLAGarcía Molleja, Javier, et al. AlN Thin Films Deposited By DC Reactive Magnetron Sputtering: Effect of Oxygen On Film Growth. 2013.
Nota: a formatação da citação pode não corresponder 100% ao definido pela respectiva norma.